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1.2 µm CMOS PROM, 2 PolySi, 2 Me, zappable link

範圍 意義
Тип карточки товара Сложная
Application, features CMOS master-slice chip

 NMOS: 

Vtn=1.0 V, Ic >10 mA. Ubr>12V

 

PMOS: 

Vtр=1.0 V, Ic >4.0 mA, Ubr>12V
Process Description Number of masks, pcs.                                              11

Design rule,µm                                                        1.2

Substrate:                            Si/B-doped / p-type/Res 12

N/P-well depth, µm                                                  5/6

Gate SiO2, Å                                                    250-300

Interlayer dielectric:                                            BPSG

Channel length: NMOS/PMOS, µm                         2.0

Contacts, µm                                                     2.0x2.0

Space line Me1, µm                                                    8

Space line Me 2, µm                                                  10
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