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Bipolar technology for the manufacture of high-power npn-transistors with Darlington

Bipolar technology for the manufacture of high-power npn-transistors with Darlington

範圍 意義
Тип карточки товара Сложная
Application, features UCB = (60-70) V

UCE = (60-70) V

 Ic= (2,0-12) A

 h21E >500
Process Description Epi structure:

Substrate:                        Si/ B-doped/ p-type/ Res 0,05/ (111):

Thickness of the layer, µm                                                 25-33

Resistivity, Ohm/cm                                                            10-18

6,7 masks (contact)

Base: Phosphorous ion implantation,

depth, µm                                                                                   6-8

Emitter: boron diffusion,

depth, µm                                                                            2,5-5,5

p-n junction protection :                                          SiO2, Ta2O5

Metallization :                                                                  Al 4, 5 µm

Backside:                                                                            Ti-Ni-Ag
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