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Bipolar technology for high-power npn-transistors manufacturing with the range of operating voltages: 160-300 V

Bipolar technology for high-power npn-transistors manufacturing with the range of operating voltages: 160-300 V

範圍 意義
Тип карточки товара Сложная
Application, features UCB = (160-300) V

UCE = (160-300) V

 Ic= (0,1-1,5) A

 h21E > 25
Process Description Epi structure:

Substrate:                        Si/Sb-doped/ n-type/Res 0,01 (111):

Thickness of Epi layer, µm                                                  35,50

Resistivity, Ohm/cm                                                                   23

7-8 masks (contact)

Base: ion implantation, depth, µm                                  2,8-4,6

Emitter: diffusion, depth, µm                                             1,4-2,8

collector-base p-n junction protection:                             SiPOS

Metallization :                                                                 Al     1,4 µm

Backside:                                                         Ti-Ni-Ag (Sn-Pb-Sn)

Passivation:                                                              low temp. PSG
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