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3-5 V, 0.8 µm CMOS, 1 PolySi (2 PolySi), 2 Me, 200mm wafers

3-5 V, 0.8 µm CMOS, 1 PolySi (2 PolySi), 2 Me, 200mm wafers

範圍 意義
Тип карточки товара Сложная
Application, features IC for telephony, customized IC,

VDD 3 V… 5  V

 

NMOS: Vtn=0.6 V, Usd >10 V

PMOS: Vtр=-0.7 V, Usd >10 V
Process Description Number of masks, pcs.                                   14 (16)

Design rule,µm                                                    0.8

Substrate:                        Si/ P-doped/n-type/Res 4.5

                     or  Si/B-doped/ p-type/Res 12; 2 wells

N/P-wells depth, µm                                           4/4

Interlayer dielectric:

SACVD SiO2 + PE (TEOS)                          1,05 µm

Gate SiO2, Å                                                 130/160

NMOS/PMOS channel length, µm                 0.9/1.0

N&P LDD- drains

Me I                                                    Ti/AlCu/Ti/TiN

Space line PolySi,µm                                           1.9

Contacts 1 (filled in by W), µm                         Ø 0.7

Space line Me 1, µm                                             2.2

Me2                                                               Ti/AlCu

Contacts 2 (filled in by W),µm                        Ø 0.7

Space line Me 2, µm                                             2.4
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