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Bipolar technology for the manufacture of npn-transistors with the range of collector current: 7,5÷16 A

Bipolar technology for the manufacture of npn-transistors with the range of collector current: 7,5÷16 A

範圍 意義
Тип карточки товара Сложная
Application, features UCB = (80-160) V

UCE = (30-90) V

 Ic= (7,5-16) A

h21E >15
Process Description Epi structure

Substrate:                       Si/B-doped/ p-type/ Res 0,05/ (111):

Thickness of Epi layer, µm                                               25-28

Resistivity, Ohm/cm                                                              8-11

7 masks (contact)

Base:Phosphorous ion implantation, depth, µm       4,5-7,5                                                     

Emitter: boron  diffusion,  depth, µm                            1,4-2,5

p-n junction protection :                                       SiO2, Ta2,O5

Metallization :                                                              Al  4, 0 µm

Backside:                                                                         Ti-Ni-Ag
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